Ceramics Products

pBN Heaters

Improved thermal uniformity at higher temperatures

pBN Heaters and Chucks (ESC)

pBN/PG heaters operate at 1700°C and higher with excellent thermal uniformity (2°C on wafer) in an ultra-high vacuum. As nonbrittle refractory materials, they owe their exceptional purity to a high-temperature chemical vapor deposition production method which makes them chemically inert to most corrosive gases and liquids and unaffected by most molten metals. Momentive Technologies can even custom-design heater chucks (ESC) for your high-temperature (up to 1000°C) wafer handling needs.

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PBN heaters and e-chucks

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No. 6, 10th Floor, No. 65, Gaotie 7th Road, Zhubei City, Hsinchu, Taiwan


No. 1088 Yuanshen road, Suite 1101 Ping’an Fortune Building, Shanghai 200122, China

+86 21 5848 1388


Momentive Technologies Korea Ltd.

7F of WONIK Building, 20, Pangyo-ro 255beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do,
Republic of Korea

+82 31 8038 9069


Momentive Technologies Japan KK

Park West 10th floor, 6-12-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo 1600023,

+81 3 6721 1910