Ceramics Products

TaC Coated Graphite Heater

For High Temperature Thin Film Deposition Equipment

Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the life of heaters in harsh environment, reduces equipment maintenance cycle/cost, and increase production yield.

Key Features

  • Temperature stability > 2200 °C
  • Ultra high purity
  • Hard coat with low particle release
  • Resistance to H2, NH3, SiH4, CH4
  • Resistance to thermal stock
  • Stable hot electrical resistance
  • Robust electrical contact
  • Conformal coating coverage
  • Strong adhesive to graphite
  • Simple 1D to complex 3D shapes

Potential Applications

  • Resistive heating coil
  • CVD hot filament
  • Inductive heating plate
  • Inductive heating cylinder

TaC Coating with High Crystallinity and Excellent Uniformity

TaC-Coating-with-High-Crystallinity-and-Excellent-Uniformity 10µm
10µm
TaC-Coating-with-High-Crystallinity-and-Excellent-Uniformity 300µm
300µm

IR and Optical Image of TaC Heater at 1100°C

TaC Hot Filament Thermal Cycled to 2000°C at Rate 1000°C/min

Density (gm/cm3) Emissivity CTE (xl0-6/K) Hardness (HK) Resistance (Ohm-cm) Thermal Stability Etch Rate in NH3(µm/hr) Etch Rate in H2(µm/hr) Thickness Variation
TaC
14.3
0.3
6.3
2000
1x10-5
>2200°C
0.2
0.1
-5%
SiC
3.2
0.8
4.5
2800
2x10-3
<1600°C
1.5
1.7
-10%

Typical values.
The information provided in these charts is for informational purposes only. It is not a product or material recommendation and it is shared with you on the express condition that you will use your own expertise and professional judgment in applying any information to a specific use case or need. This is general information only, the validity of which may be affected by individual factors that are unknown to Momentive Technologies. It is the responsibility of those using this information to ensure appropriate interpretation and application is undertaken with regards to any specific situation.

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TaC Heaters

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台湾办事处

No. 6, 10th Floor, No. 65, Gaotie 7th Road, Zhubei City, Hsinchu, Taiwan

中国办事处

No. 1088 Yuanshen road, Suite 1101 Ping’an Fortune Building, Shanghai 200122, China

+86 21 5848 1388

한국사무소

Momentive Technologies Korea Ltd.

7F of WONIK Building, 20, Pangyo-ro 255beon-gil, Bundang-gu, Seongnam-si, Gyeonggi-do,
Republic of Korea

+82 31 8038 9069

日本オフィス

Momentive Technologies Japan KK

Park West 10th floor, 6-12-1, Nishi-Shinjuku, Shinjuku-ku, Tokyo 1600023,
Japan

+81 3 6721 1910