Heaters, Electrostatic Chucks and Modules

Momentive Technologies offers high-temperature resistive and inductive heaters with a proprietary Tantalum Carbide (TaC) coating. These TaC-coated graphite heaters ensure high-temperature stability and chemical resistance, extending heater lifespan, reducing maintenance costs, and improving production yield.

Improved temperature uniformity from the thermal leveler conductive billet results in better yield in wafer processing applications, faster temperature stabilization, and improved throughput.

Wafer handling at elevated temperatures can be challenging. Pyrolytic Boron Nitride Electrostatic Chucks (pBN ESCs) can hold wafers at temperatures exceeding 1000°C, making them the most versatile ESCs on the market.