Heaters, E-chucks and Modules-2024

Ceramics Products Thermal Leveler Conductive Billet Improve semiconductor process yield with greater thermal uniformity Improved temperature uniformity from the thermal leveler conductive billet results in better yield in wafer processing applications, faster temperature stabilization, and improved throughput. Momentive Technologies fully passive solution with integrated TPG® also enables simpler designs and more corrosion resistant materials. Typical […]

Ceramics Products Heaters and Thermal Solutions Improved thermal uniformity at higher temperatures With more than four decades of designing heater solutions for semiconductors and compound semiconductors, Momentive Technologies is poised to help differentiate your crystal and wafer processing equipment. Based upon this experience, Momentive Technologies has engineered a number of novel heater solutions focused upon

Ceramics Products pBN Heaters & Electrostatic Chucks For High Temprature Semiconductor Processing pBN Heaters and Chucks (ESC) pBN/PG heaters operate at 1700°C and higher with excellent thermal uniformity (2°C on wafer) in an ultra-high vacuum. As nonbrittle refractory materials, they owe their exceptional purity to a high-temperature chemical vapor deposition production method which makes them

Ceramics Products TaC Coated Graphite Heater For High Temperature Thin Film Deposition Equipment Momentive Quartz Technologies Inc offers high temperature resistive or inductive heaters with a proprietary coating known as Tantalum Carbide (TaC). With its high temperature stability and high chemical resistance, TaC coated graphite heater provides a more robust heating solution that enhances the